01
RPS Repair
Remote Plasma Source Repair related with Insitu CVD Chamber Cleaning
PRODUCTS
Products
Actual product photographs from our company introduction materials, organized by product and service category.
02
O3 Generator
Repair Service for SACVD & Diffusion Process 200mm / 300mm Series
03
RF Generator
RF Generator Repair Service for Semiconductor Manufacturing Equipment
04
Revolution III / Revolution V
Repair Service for Oxygen and Nitrogen Radical Generators
05
Various Type Valve Repair
Repair Service for Various Valves including APC, Slit, Gate, and Angle Valves.
06
E-Saver
Energy-saving solution designed for dry pump efficiency improvement.
About the listed information
The public website provides only a summary. Please contact us for detailed specifications, supported models, stock, and repair availability.